On-chip circuitry for a CMOS parallel scanning AFM
- 20 July 1999
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 3673, 240-248
- https://doi.org/10.1117/12.354275
Abstract
We present on-chip signal conditioning circuitry for the first parallel scanning Atomic Force Microscope sensors fabricated in industrial CMOS technology. The system combines, on a single chip, (1) two cantilevers for parallel scanning, (2) thermal actuators for independent deflection of the two cantilevers, (3) sensors to measure the deflection and (4) offset compensation and signal conditioning circuitry. It was fabricated using the 2.0 micrometers CMOS process of Austria Mikro Systeme and CMOS compatible post-processing micromachining. Scanning images were successfully acquired in contact and dynamic mode. The resolution of the recorded tapping mode images is better than 20 angstroms.Keywords
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