Transport of sputtered neutral particles

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Abstract
The initial deposition rate of sputtered material along the walls of a trench is calculated numerically. The numerical scheme is a nonstatistical description of long-mean-free-path transport in the gas phase. Gas-phase collisions are included by using a ‘‘transition matrix’’ to describe the particle motion, which in the present work is from the source through a cylindrical chamber and into a rectangular trench. The method is much faster and somewhat more accurate than Monte Carlo methods. Initial deposition rates of sputtered material along the walls of the trench are presented for various physical and geometrical situations, and the deposition rates are compared to other computational and experimental results.

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