Plasma sputter negative ion source with ECR discharge (invited)
- 1 April 1992
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 63 (4) , 2669-2671
- https://doi.org/10.1063/1.1142871
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Further evaluation of the high intensity plasma sputter heavy negative ion sourceNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1988
- A versatile high intensity plasma sputter heavy negative ion sourceNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1988