Nanolithography by local anodic oxidation of metal films using an atomic force microscope
- 1 July 1998
- journal article
- Published by Elsevier in Physica E: Low-dimensional Systems and Nanostructures
- Vol. 2 (1-4) , 748-752
- https://doi.org/10.1016/s1386-9477(98)00153-2
Abstract
No abstract availableKeywords
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