Film thickness distribution at oblique evaporation
- 1 February 1982
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 20 (2) , 245-247
- https://doi.org/10.1116/1.571275
Abstract
The film thickness distribution and lateral distribution of the arrival rate of atoms or molecules at a substrate using evaporation sources with nonperpendicular and nonrotating substrates were determined for goldfilms and compared with two theoretical models—a cosine distribution and a Knudsen effusion model. (AIP)Keywords
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