Modification of a commercial SEM with a computer controlled cathode stabilized power supply
- 1 January 1993
- Vol. 15 (4) , 208-211
- https://doi.org/10.1002/sca.4950150405
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- X-ray-lithography mask metrology: Use of transmitted electrons in an SEM for linewidth measurementJournal of Research of the National Institute of Standards and Technology, 1993
- Characteristics of the hot cathode electron microscope gunBritish Journal of Applied Physics, 1952