Phenomenological Interpretation of Excimer Laser Ablation of Single-Crystal Oxides (MgO, SrTiO3 and LaAlO3)
- 1 September 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (9R)
- https://doi.org/10.1143/jjap.33.4971
Abstract
ArF excimer laser ablation of single-crystal oxide surfaces was investigated experimentally and theoretically. All specimens (MgO, SrTiO3 and LaAlO3) showed the presence of the threshold laser fluence for the ablation, possibly suggesting a thermal process. With increase in the fluence, etching rate increased sublinearly (downward bowing), and with further increase in the fluence, it increased almost linearly. To interpret the ablation mechanism and this nonlinearity, we proposed the ablation model, imposing two factors (effects of laser recoil pressure and optical reflection by the surface molten layer) to a previous dynamical model. Our proposed model explained the results well, and it was found that surface reflection by the molten layer is mainly responsible for the nonlinearity.Keywords
This publication has 9 references indexed in Scilit:
- Effect of Nonstoichiometry on Dielectric Properties of Strontium Titanate Thin Films Grown by ArF Excimer Laser AblationJapanese Journal of Applied Physics, 1993
- Epitaxial SrTiO3 Thin Films Grown by ArF Excimer Laser DepositionJapanese Journal of Applied Physics, 1992
- Laser-target interactions during pulsed laser deposition of superconducting thin filmsJournal of Applied Physics, 1991
- A thermo-mechanical model for laser ablationJournal of Applied Physics, 1991
- Thermal Analysis of Target Surface in the Ba-Y-Cu-O Film Preparation by Laser Ablation MethodJapanese Journal of Applied Physics, 1990
- Nature of the pulsed laser process for the deposition of high T c superconducting thin filmsApplied Physics Letters, 1988
- Substrate effects on the properties of Y-Ba-Cu-O superconducting films prepared by laser depositionJournal of Applied Physics, 1988
- Observation of two distinct components during pulsed laser deposition of high T c superconducting filmsApplied Physics Letters, 1988
- Effects Due to Absorption of Laser RadiationJournal of Applied Physics, 1965