Three Dimensional Monte Carlo Simulation Of Ion Implantation With Octree Based Point Location
- 25 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 122-123
- https://doi.org/10.1109/vpad.1993.724750
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Three Dimensional Monte Carlo Simulation Of Ion Implantation With Octree Based Point LocationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Monte Carlo simulation of ion implantation into two- and three-dimensional structuresIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1989
- Two methods to improve the performance of Monte Carlo simulations of ion implantation in amorphous targetsIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1989
- Two‐Dimensional Ion Implantation Profiles from One‐Dimensional ProjectionsJournal of the Electrochemical Society, 1985