X-ray diffraction investigations of defects generated in Si single crystals by thermal oxidation
- 16 June 1975
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 29 (2) , 535-543
- https://doi.org/10.1002/pssa.2210290223
Abstract
No abstract availableKeywords
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