Nuclear analysis of zirconium nitride thin films
- 1 April 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 24-25, 701-704
- https://doi.org/10.1016/s0168-583x(87)80229-x
Abstract
No abstract availableKeywords
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- Very high rate reactive sputtering of TiN, ZrN and HfNThin Solid Films, 1983
- Tribological coatings deposited by red-hot rod target sputteringThin Solid Films, 1980
- Deuteron induced reactions on 14NNuclear Physics A, 1969