Chemical sensors based on dielectric response of functionalized mesoporous silica films
- 1 October 2001
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 16 (10) , 2810-2816
- https://doi.org/10.1557/jmr.2001.0387
Abstract
Dielectric response of mesoporous silica films was monitored as a function of several gas-phase chemical species. The effects of humidity, ammonia, and methane on dielectric constant and dissipation factor of films subjected to different chemical treatments are described. Dielectric constant and dissipation factor of partially dehydroxylated films were found to be highly sensitive to both water vapor and ammonia in air. The capacitive devices based on mesoporous silica films show potential for use in chemical sensors.Keywords
This publication has 14 references indexed in Scilit:
- Low Dielectric Constant Mesoporous Silica Films Through Molecularly Templated SynthesisAdvanced Materials, 2000
- Synthesis, characterization and sensing application of novel semiconductor oxidesTalanta, 1998
- Development and Calibration of Field-Effect Transistor-Based Sensor Array for Measurement of Hydrogen and Ammonia Gas Mixtures in Humid AirAnalytical Chemistry, 1998
- Mesoporous molecular sieve thin filmsPublished by Elsevier ,1998
- Chemical sensors based on hydrophobic porous sol-gel films and ATR-FTIR spectroscopySensors and Actuators B: Chemical, 1996
- PrefacePublished by Elsevier ,1995
- A new family of mesoporous molecular sieves prepared with liquid crystal templatesJournal of the American Chemical Society, 1992
- Ordered mesoporous molecular sieves synthesized by a liquid-crystal template mechanismNature, 1992
- THE INFRARED SPECTRUM OF AMMONIA ADSORBED ON CABOSIL SILICA POWDERCanadian Journal of Chemistry, 1965
- Adsorption of ammonia upon fluorine containing porous glassTransactions of the Faraday Society, 1965