Parallel scanning AFM with on-chip circuitry in CMOS technology
- 1 January 1999
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 3224 (10846999) , 447-452
- https://doi.org/10.1109/memsys.1999.746870
Abstract
We present the first force sensors for application in Atomic Force Microscopy (AFM) fabricated with industrial CMOS technology. Sensing is based on two different detection schemes: a piezoresistive Wheatstone bridge and stress-sensing MOS transistors. The system combines on a single chip (i) two cantilevers for parallel scanning, (ii) thermal actuators for independent deflection of the two cantilevers, (iii) sensors to measure the deflection, and (iv) offset compensation and signal conditioning circuitry. The AFM probes were tested in contact and dynamic mode. In the dynamic mode, images with a resolution of better than 20 /spl Aring/ were recorded. Moreover, we successfully took parallel scanning images in contact mode.Keywords
This publication has 9 references indexed in Scilit:
- Industrial fabrication method for arbitrarily shaped silicon N-well micromechanical structuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- On-chip circuitry for a CMOS parallel scanning AFMPublished by SPIE-Intl Soc Optical Eng ,1999
- Mounting of micromachined diamond tips and cantileversSurface and Interface Analysis, 1999
- Wafer- and piece-wise Si tip transfer technologies for applications in scanning probe microscopyJournal of Microelectromechanical Systems, 1999
- Centimeter scale atomic force microscope imaging and lithographyApplied Physics Letters, 1998
- Micromachined thermally based CMOS microsensorsProceedings of the IEEE, 1998
- CMOS chemical microsensors based on resonant cantilever beamsPublished by SPIE-Intl Soc Optical Eng ,1998
- CVD diamond probes for nanotechnologyApplied Physics A, 1998
- Characterization of an integrated force sensor based on a MOS transistor for applications in scanning force microscopySensors and Actuators A: Physical, 1998