Elemental analysis of thin layers by elastic heavy ion scattering
- 1 January 1992
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 63 (1-2) , 77-82
- https://doi.org/10.1016/0168-583x(92)95173-o
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
- Determination of concentration profiles by elastic recoil detection with a ΔE−E gas telescope and high energy incident heavy ionsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Performance of a bragg ionization chamber for depth profiling and surface analysisNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- An ERD/RBS/PIXE apparatus for surface analysis and channelingNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- Properties of buried insulating layers in silicon formed by high dose implantation at 60 keVNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- High resolution depth profiling of light elements in high atomic mass materialsNuclear Instruments and Methods in Physics Research, 1983
- The importance of screening corrections in accurate RBS measurements at MeV energiesRadiation Effects, 1980
- Depth profiling of light elements in materials with high-energy ion beamsJournal of Vacuum Science and Technology, 1977
- Comparison of back-scattering parameters using high energy oxygen and helium ionsThin Solid Films, 1973