Porous silicon layer coupled with thermoelectric cooler: a humidity sensor
- 25 February 2000
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 79 (3) , 189-193
- https://doi.org/10.1016/s0924-4247(99)00285-x
Abstract
No abstract availableKeywords
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