Production of Metallic Small Particles by Vacuum Evaporation

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Abstract
A multilayer film of metallic small particles was produced by the alternate evaporation of metal and LiF on a substrate. The process of the production was automatically carried out by the use of a deposition controller which also controlled the sequence of the process in addition to the evaporation rate and film thickness. By several hundreds or thousands of repetitions of alternate evaporations, we can obtain a sufficient amount of small particles to determine their physical properties. This method makes it possible to produce well-defined small particles because the production process under high vacuum suppresses the effect of surface oxidation, and the particle size and particle number density are controlled with high accuracy.