Ion beam synthesis of buried FeSi2 in (100) silicon
- 1 January 1992
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 12 (1-2) , 119-122
- https://doi.org/10.1016/0921-5107(92)90270-j
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- High-dose iron implantation into silicon and metalsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
- Silicide Formation By High Dose Transition Metal Implants Into Si.MRS Proceedings, 1985
- Transformation Mechanisms of the α⇆β Transition in FeSi2Physica Status Solidi (b), 1972