Challenges and confusions in the kinetics and mechanism of plasma induced deposition of a- and μc-Ge:H
- 1 January 1991
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 137-138, 779-782
- https://doi.org/10.1016/s0022-3093(05)80236-4
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Open questions regarding the mechanism of plasma-induced deposition of siliconPlasma Chemistry and Plasma Processing, 1991
- Hydrogen chemical potential and structure ofa-Si:HPhysical Review B, 1991
- Possible contribution of SiH2 and SiH3 in the plasma-induced deposition of amorphous silicon from silaneApplied Physics Letters, 1990
- The mechanism of plasma-induced deposition of amorphous silicon from silanePlasma Chemistry and Plasma Processing, 1990