Film deposition and surface modification using intense pulsed ion beams

• 1 May 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 13  (3) , 1182-1187
• https://doi.org/10.1116/1.579858

Abstract

Keywords

• FILM DEPOSITION
• SURFACE MODIFICATION
• ION BEAMS
• PULSED ION
• MODIFICATION USING
• USING INTENSE