Effect of Deposition Parameters on the Strength of CVD β-SiC Coatings
- 1 November 1988
- journal article
- Published by Wiley in Advanced Ceramic Materials
- Vol. 3 (6) , 580-583
- https://doi.org/10.1111/j.1551-2916.1988.tb00282.x
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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- Parametric study of silicon carbide coatings deposited in a fluidized bedThin Solid Films, 1977
- The structure of chemical vapor deposited silicon carbideThin Solid Films, 1977
- Preparation and properties of vapour phase epitaxial silicon carbide diodesSolid-State Electronics, 1972
- β-Silicon Carbide FilmsJournal of the Electrochemical Society, 1969