Structural evolution during the crystallization process of germanium films prepared by plasma enhanced chemical vapour deposition
- 1 July 1993
- journal article
- other
- Published by Elsevier in Thin Solid Films
- Vol. 230 (1) , 7-9
- https://doi.org/10.1016/0040-6090(93)90339-q
Abstract
No abstract availableKeywords
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- Electrical, optical, and structural properties of reactive ion beam sputtered hydrogenated amorphous germanium (a-Ge:H) filmsJournal of Applied Physics, 1989