Physical self-assembly and the nucleation of three-dimensional nanostructures by oblique angle deposition
- 1 July 2004
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 22 (4) , 1778-1784
- https://doi.org/10.1116/1.1743178
Abstract
Growth front morphology of a thin film formed by physical vapor deposition is controlled by many factors including surface diffusion and shadowing effects. Instabilities can occur if shadowing is more dominant compared to other surface effects and can lead to many diverse physically self-assembled three-dimensional nano-size structures. In this article, we explore the fundamental nucleation and growth mechanisms of the nanostructures during oblique angle deposition. Monte Carlo simulations were carried out to predict the island density, island size distribution, and island–island correlation during the initial stages of growth. The results were compared to that obtained by the oblique angle sputter deposited tungsten films imaged by atomic force microscopy and scanning electron microscopy. Isolated islands with quasiperiodic distribution were formed as a natural consequence of the shadowing effect. Isolated columnar structures are shown to grow on these islands and the width W of the columns is predicted ...Keywords
This publication has 48 references indexed in Scilit:
- Mechanics of Patterned Helical Si Springs on Si SubstrateJournal of Nanoscience and Nanotechnology, 2003
- Retardation of oxidation in Co nanocolumns: Scanning tunneling microscopy studyApplied Physics Letters, 2002
- Periodic submicrometer structures by sputteringJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2001
- Microsprings and microcantilevers: studies of mechanical responseJournal of Micromechanics and Microengineering, 2001
- Origin and evolution of sculptured thin filmsJournal of Vacuum Science & Technology A, 2000
- Fabrication of submicrometer regular arrays of pillars and helicesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1999
- Advanced techniques for glancing angle depositionJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1998
- Scaling structure in simple screening models for columnar growthPhysical Review A, 1992
- Three-dimensional ballistic deposition at oblique incidencePhysical Review A, 1992
- Scaling structure in a simple growth model with screening: forest formation modelJournal of Physics A: General Physics, 1991