Secondary Electron Detection in a Field Emission Scanning Microscope
- 1 January 1970
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 41 (1) , 20-24
- https://doi.org/10.1063/1.1684266
Abstract
Operation of a field emission scanning microscope in a secondary electron mode is described. The microscope uses only a field emission electron gun without auxiliary lenses and a silicon surface barrier detector to detect the secondary electron current. Resolution of 100 to 200 Å with beam currents of 10−11 to 10−10 A is reported. Micrographs of a variety of specimens are shown.Keywords
This publication has 4 references indexed in Scilit:
- A Simple Scanning Electron MicroscopeReview of Scientific Instruments, 1969
- The Scanning Electron Microscope: Principles and Applications in Biology and MedicinePublished by Elsevier ,1968
- Scanning Electron MicroscopyPublished by Elsevier ,1966
- Wide-band detector for micro-microampere low-energy electron currentsJournal of Scientific Instruments, 1960