Relations between the orientations of ion bombarded single crystals, resulting surface structures and sputtered spot patterns
- 1 January 1981
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 56 (3-4) , 241-249
- https://doi.org/10.1080/00337578108229896
Abstract
Ion bombarded (111)-oriented single crystals show, under appropriate conditions, an anisotropic distribution of the sputtered target material, e.g. three main and three intermediate sputtered spots. On the bombarded crystal surface a topography with faceted cones (pyramids) can be observed simultaneously. The geometric relations between the orientations of the crystals, the faceted cones and the sputtered spot patterns have been investigated for Ag, Al, Au and Pb single crystals bombarded with energetic Ar ions.Keywords
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