Fabrication of a miniaturized electron lens system and laser micro-machining condition for silicon membrane
- 31 August 2003
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 69 (1) , 57-64
- https://doi.org/10.1016/s0167-9317(03)00229-6
Abstract
No abstract availableKeywords
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