High aspect ratio micromachining (HARM) technologies for microinertial devices

• 1 August 2000
• journal article
• Published by Springer Nature in Microsystem Technologies
• Vol. 6  (5) , 184-188
• https://doi.org/10.1007/s005420000044

Abstract

Keywords

• NICKEL
• HIGH ASPECT RATIO
• VALUE ADDED
• ASPECT RATIO
• SILICON ON INSULATOR
• CHIP
• PROCESS CONTROL