• 1 January 1986
    • journal article
    • review article
    • Vol. 1  (1) , 69-87
Abstract
Organic solvents comprise a majority of the chemicals used by the microelectronics industry. Much of the production of semiconductors, in particular, takes place in cleanrooms, where high-efficiency particulate absolute filtration units remove dust. Workers wear protective caps, gowns, masks, and booties to prevent dust contamination of the chips. The appearance of cleanliness obscures the fact that workers are exposed to a multitude of chemical and physical hazards. Recirculated air protects the chips from contamination but also exposes workers to recirculated solvent and other chemical fumes and vapors.

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