A Nitric Oxide Process for the Deposition of Silica Films

• 1 January 1967
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 114  (3) , 274
• https://doi.org/10.1149/1.2426566

Abstract

Keywords

• SILICA FILMS
• NITRIC OXIDE PROCESS
• DEPOSITION OF SILICA