The analytical solution of the contact problem of spherical indenters on layered materials: application for the investigation of TiN films on silicon
- 1 December 1995
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 270 (1-2) , 371-375
- https://doi.org/10.1016/0040-6090(95)06751-5
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Finite element comparative study of elastic stresses in single, double layer and multilayered coated systemsThin Solid Films, 1993
- A simple predictive model for spherical indentationJournal of Materials Research, 1993