Frictional study of IC-processed micromotors
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3) , 180-183
- https://doi.org/10.1016/0924-4247(90)85034-2
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- IC-processed electrostatic synchronous micromotorsSensors and Actuators, 1989