On the 2D modelling of horizontal CVD reactors and its limitations
- 1 September 1988
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 91 (4) , 497-508
- https://doi.org/10.1016/0022-0248(88)90117-0
Abstract
No abstract availableThis publication has 14 references indexed in Scilit:
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