Simply irresistible silicides

Publisher Website
Google Scholar
Abstract
If the microelectronics industry is to continue to satisfy the demand for ever increasing amounts of memory from computers, it needs to manufacture devices on ever smaller scales. However, each new generation of logic chips depends on having materials with the right characteristics to make fabrication both economical and practical. In the latest generations of logic circuits, one group of materials, the silicides, has proved highly beneficial.

This publication has 0 references indexed in Scilit: