Development of environmental scanning electron microscopy electron beam profile imaging with self‐assembled monolayers and secondary ion mass spectroscopy
- 1 March 1997
- Vol. 19 (2) , 71-74
- https://doi.org/10.1002/sca.4950190202
Abstract
A method for demonstrating the scattering of the primary electron beam in the presence of a gas has been developed. A self‐assembled decanethiol monolayer is damaged by primary beam electrons. The damaged portion of the mono‐layer is exchanged with another thiol‐containing molecule by immersion in solution. The resulting film is imaged using a secondary ion mass spectrometer. Three‐dimensional reconstruction of the data yields a representation of scattered electrons in the gaseous environment of the environmental scanning electron microscope.Keywords
This publication has 5 references indexed in Scilit:
- Patterning of self-assembled alkanethiol monolayers on silver by microfocus ion and electron beam bombardmentApplied Physics Letters, 1994
- Effects of chamber pressure and accelerating voltage on X-RAY resolution in the ESEMProceedings, annual meeting, Electron Microscopy Society of America, 1992
- Static secondary ion mass spectrometry of self-assembled alkanethiol monolayers on goldLangmuir, 1992
- Theory of the Gaseous Detector Device in the Environmental Scanning Electron MicroscopePublished by Elsevier ,1990
- Foundations of Environmental Scanning Electron MicroscopyPublished by Elsevier ,1988