Photo-assisted CVD of epitaxial SiC films on .ALPHA.-Al2O3 substrate and light irradiation effects.
- 1 January 1989
- journal article
- Published by Japan Society of Powder and Powder Metallurgy in Journal of the Japan Society of Powder and Powder Metallurgy
- Vol. 36 (2) , 143-146
- https://doi.org/10.2497/jjspm.36.143
Abstract
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