Ceramic thin films by sol-gel processing as novel materials for integrated humidity sensors
- 1 February 1996
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 31 (1-2) , 59-70
- https://doi.org/10.1016/0925-4005(96)80017-7
Abstract
No abstract availableKeywords
This publication has 34 references indexed in Scilit:
- Ceramic sensors for humidity detection: the state-of-the-art and future developmentsPublished by Elsevier ,2000
- Humidity sensitivity of sputtered TiO2 thin filmsSensors and Actuators B: Chemical, 1994
- Study of the conduction mechanism of MgAl2O4 at different environmental humiditiesElectrochimica Acta, 1993
- Humidity- and gas-sensing properties with an Fe2O3 film sputtered on a porous Al2O3 filmSensors and Actuators B: Chemical, 1993
- Humidity-sensitive electrical properties of MgAl2O4 thin filmsSensors and Actuators B: Chemical, 1993
- Development of chemical sensors using microfabrication and micromachining techniquesSensors and Actuators B: Chemical, 1993
- Microstructure and Electrical Properties of MgAl2O4 Thin Films for Humidity SensingJournal of the American Ceramic Society, 1993
- Magnesium aluminium spinel thin film as a humidity sensorSensors and Actuators B: Chemical, 1992
- Humidity SensorsJournal of the American Ceramic Society, 1991
- Humidity sensors: Principles and applicationsSensors and Actuators, 1986