Low energy electron microscopy of nanometer scale phenomena
- 1 March 1991
- journal article
- research article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 9 (2) , 403-408
- https://doi.org/10.1116/1.585581
Abstract
The physical principles of low energy electron microscopy (LEEM) are discussed. The application of this nonscanning imaging method to the study of surface phenomena on the 10 nm scale is illustrated by examples of the growth and desorption of metal films on metal and semiconductor substrates as well as by phase transitions in these films.Keywords
This publication has 0 references indexed in Scilit: