An Ion Microprobe Analyzer

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Abstract
An ion microprobe mass analyzer was constructed for the analysis of solids. A beam of argon ions was used as a probe. The current and the diameter of the probe were 10-7 A and 0.25 mm respectively. A double focusing mass spectrometer was used to analyze the mass of the secondary ions. The mean radii of the ions in the electric field and in the magnetic field were both 10.0 cm. The deflection angles in these fields were 63.6° and 90° respectively. A Cu-Be secondary electron multiplier followed by a d.c. amplifier was used as an ion detector. Some characteristics with the variation of the peak height due to the change of the surface conditions were clarified. The relative sensitivities for Ti, V, Cr, Mn, Fe, Co, Ni in an iron alloy were determined. The detectable limits for boron in silicon and for chromium in iron were estimated to be 5 ppm and 1 ppm respectively. The distributions of nickel and chromium in the iron meteorite, Odessa, were briefly studied.