Amorphization and Recrystallization in MeV Ion Implanted InP Crystals
- 1 January 1988
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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- High resolution transmission electron microscopy study of Se+-implanted and annealed GaAs: Mechanisms of amorphization and recrystallizationApplied Physics Letters, 1984
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