An easy method to accurately align ion-bombardment guns for depth profiling in Auger electron spectroscopy

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Abstract
A problem with depth profiling in Auger electron spectroscopy is the alignment of the electron and sputter ion beams so that they are coincident on the specimen at the focal point of the analyzer. Most procedures used to date are tedious and require the use of a Faraday cup. The technique reported here allows the direct, precise, and quick alignment of the ion bombardment beam utilizing the optics of the electron spectrometer used for Auger analysis. A typical 2 kV focused ion beam can be aligned within a few minutes using the phenomenon of low energy ion excited Auger electron analysis.

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