LASEM — a novel combined device for laser modification in SEM

• 1 January 1987
• journal article
• research article
• Published by Wiley in Scanning
• Vol. 9  (3) , 99-107
• https://doi.org/10.1002/sca.4950090303

Abstract

Keywords

• ADAPTATIONS
• LASER
• ELECTRON MICROSCOPE
• CRACKING
• MELTING
• TUNGSTEN
• THERMAL
• JEOL
• PULSED