Influence of oxygen flow rate on the structural and mechanical properties of reactively magnetron sputter-deposited Zr–B–O coatings

This publication has 15 references indexed in Scilit:

• Influence of Diborane Flow Rate on the Structure and Stability of CVD Boron Nitride Films
  The Journal of Physical Chemistry, 1996
• Optical properties and corrosion behaviour of sputtered Zr-B and Zr-B-N coatings
  Surface and Coatings Technology, 1993
• Experimental investigation of the ZrBClH CVD system
  Journal of the European Ceramic Society, 1993
• Sputter deposition of decorative coatings based on ZrB2 and ZrB12
  Surface and Coatings Technology, 1992
• Deposition of thin films of Zirconium and Hafnium Boride by plasma enhanced chemical vapor deposition
  Advanced Materials, 1992
• Sputter deposition of wear-resistant coatings within the system ZrBN
  Materials Science and Engineering: A, 1991
• Effect of Angular Distribution of Ejected Atoms from a Target on the Uniformity of Thickness and Composition of MoSi_x Sputtering Films
  Japanese Journal of Applied Physics, 1990
• Sputter deposition of ultrahard coatings within the system Ti-B-C-N
  Surface and Coatings Technology, 1990
• Characterization of sputter-deposited ZrBxOy films
  Journal of Vacuum Science & Technology A, 1990
• An XPS study of the interaction of oxygen with zirconium
  Surface Science, 1989