Fabrication of thin films with highly porous microstructures

• 1 May 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 13  (3) , 1032-1035
• https://doi.org/10.1116/1.579579

Abstract

Keywords

• THIN FILMS
• POROUS MICROSTRUCTURES
• HIGHLY POROUS
• FABRICATION OF THIN