CW LASER ANNEALING OF ION-IMPLANTED POLYCRYSTALLINE SILICON FILMS
- 1 January 1980
- book chapter
- Published by Elsevier
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
- Electrical conduction in implanted polycrystalline siliconJournal of Electronic Materials, 1979
- Transport properties of polycrystalline silicon filmsJournal of Applied Physics, 1978
- cw laser anneal of polycrystalline silicon: Crystalline structure, electrical propertiesApplied Physics Letters, 1978
- The electrical properties of polycrystalline silicon filmsJournal of Applied Physics, 1975
- Growth and Characterization of Polycrystalline SiliconJournal of the Electrochemical Society, 1973
- Chemical Vapor Deposited Polycrystalline SiliconJournal of the Electrochemical Society, 1972
- Hall Mobility in Chemically Deposited Polycrystalline SiliconJournal of Applied Physics, 1971