Backscattered Electron Signal from Alignment Mark: Experiment and Simulation
- 1 June 1981
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 20 (6) , L385
- https://doi.org/10.1143/jjap.20.l385
Abstract
A backscattered electron signal dependence on an alignment mark shape was experimentally studied to clarify the relation between signal and mark shape. Using a simple model for electron scattering, the relation is interpreted consistently and the signal is successfully simulated.Keywords
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