Formation of CoSi2 on amorphous silicon by RTA
- 1 September 1989
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 38 (1-4) , 72-79
- https://doi.org/10.1016/0169-4332(89)90521-7
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- Interactions in the Co/Si thin-film system. I. KineticsJournal of Applied Physics, 1978