Use of an XY oscilloscope in interferometric measurements of small displacements
- 1 July 1973
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 6 (7) , 612-613
- https://doi.org/10.1088/0022-3735/6/7/009
Abstract
A laser interferometer for the accurate measurement of displacements is described. The use of an XY oscilloscope leads to a simple design and an easy adjustment of the interferometer and improves the resolution of the system to about 4 nm.Keywords
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