Effect of atomic hydrogen on the growth of Ge/Si(100)

• 1 May 1997
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 15  (3) , 927-929
• https://doi.org/10.1116/1.580624

Abstract

Keywords

• GROWTH OF GE/SI
• HYDROGEN ON THE GROWTH
• EFFECT OF ATOMIC HYDROGEN