A high rate sputtering process for the formation of hard friction-reducing TiN coatings on tools
- 1 October 1982
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 96 (1) , 79-86
- https://doi.org/10.1016/0040-6090(82)90215-2
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- The activated reactive evaporation process: Developments and applicationsThin Solid Films, 1981
- Tribologische Prüfungen an Oberflächenschichten aus Titancarbid, Titannitrid, Chromcarbid und EisenboridMaterialwissenschaft und Werkstofftechnik, 1980
- Chemical vapour deposition applied in tribologyWear, 1978
- Fundamentals of Ion PlatingJournal of Vacuum Science and Technology, 1973