Acceleration sensor with integrated compensation of temperature effects fabricated by the LIGA process
- 15 April 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 42 (1-3) , 426-429
- https://doi.org/10.1016/0924-4247(94)80026-x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The LIGA technique-A novel concept for microstructures and the combination with Si-technologies by injection moldingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Fabrication of capacitive acceleration sensors by the LIGA techniqueSensors and Actuators A: Physical, 1991
- Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)Microelectronic Engineering, 1986