Investigations on free-standing polysilicon beams in view of their application as transducers
- 30 April 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 23 (1-3) , 1053-1059
- https://doi.org/10.1016/0924-4247(90)87088-z
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Design considerations for a practical electrostatic micro-motorSensors and Actuators, 1987
- Resonator sensors-a reviewJournal of Physics E: Scientific Instruments, 1985