Scanning local probe interferometer and reflectometer: application to very low relief objects

30 November 1994

conference paper
Published by SPIE-Intl Soc Optical Eng

Vol. 2341, 239-248
https://doi.org/10.1117/12.195546

Abstract

For the requirements of nanometrology, a new configuration of scanning interferometric profilometer, using a tapered fiber as emitting and detecting local probe, has been recently developed. The very large versatility allows a classical detection in far field, as well as a superresolution in near-field, for both transparent or nontransparent samples.© (1994) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

Keywords

INTERFEROMETERS
NEAR FIELD
PROFILOMETERS
SUPER RESOLUTION

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